Two-dimensional X-ray waveguides on a grating

Two-dimensional X-ray waveguides are promising optical elements providing a highly coherent and divergent beam for possible applications in coherent X-ray imaging and scattering. We have fabricated arrays of 2D waveguide nanostructures by e-beam lithography. To characterize the device a parallel synchrotron beam has been coupled into the front side and the farfield diffraction pattern has been mapped as a function of the angle of incidence.