Application of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy films
Keywords: 61.05.cm; 81.15.Gh; 68.35.Ct; 68.35.Fx; 68.55.aj; Atomic concentration profiles; Soft X-ray reflectometry; Strontium titanate; Thin films; Interface; Underlayer material;