
Microstructuring of fused silica by laser-induced backside wet etching using picosecond laser pulses
Keywords: سیلیس مخلوط شده; 81.55.Xi; 81.65.Cf; 42.62.Cf; 79.20.Ds; 81.05.J; Laser; Fused silica; Etching; LIBWE; Picosecond; Toluene; Structuring;