Combined in-depth X-ray Photoelectron Spectroscopy and Time-of-Flight Secondary Ion Mass Spectroscopy study of the effect of deposition pressure and substrate bias on the electrical properties and composition of Ga-doped ZnO thin films grown by magnetron
Keywords: اکسید روی گالیم; Thin films; Transparent conductive oxide; Gallium-doped zinc oxide; In-depth composition; Electrical properties;