Keywords: رسوب اسپری پرتو یون; Ion beam sputter deposition; Mircostructure; Microfabrication;
مقالات ISI رسوب اسپری پرتو یون (ترجمه نشده)
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Keywords: رسوب اسپری پرتو یون; Ion beam sputter deposition; Dynamic scaling theory; Growth kinetics; Static and dynamic scaling constant; Scaling phenomenon
Reactive Ar ion beam sputter deposition of TiO2 films: Influence of process parameters on film properties
Keywords: رسوب اسپری پرتو یون; Ion beam sputter deposition; TiO2; Optical properties; Mass density; Composition; Ion-solid interaction;
X-ray photoelectron spectroscopy studies on AlN thin films grown by ion beam sputtering in reactive assistance of N+/N2+ ions: Substrate temperature induced compositional variations
Keywords: رسوب اسپری پرتو یون; AlN thin films; Ion beam sputter deposition; Reactive assistance; Substrate temperature; XPS;
Systematic investigation of the properties of TiO2 films grown by reactive ion beam sputter deposition
Keywords: رسوب اسپری پرتو یون; Ion beam sputter deposition; TiO2; Optical properties; Mass density; Composition; Implantation; Root mean square roughness;
Complete coating of metal rings by ion beam sputtering of a W-shaped concave target with a broad-beam ion source
Keywords: رسوب اسپری پرتو یون; Ion beam sputter deposition; Ring coating; Corrosion; Three-dimensional sputter target
Growth of single-phase nanostructured Er2O3 thin films on Si (100) by ion beam sputter deposition
Keywords: رسوب اسپری پرتو یون; Single-phase nanocrystalline Er2O3 thin films; Er silicides; Surface analysis; Ion beam sputter deposition
Ion beam sputter deposition of Ge films: Influence of process parameters on film properties
Keywords: رسوب اسپری پرتو یون; Ion beam sputter deposition; Amorphous Germanium;
Deep single step vertical ICP–RIE etching of ion beam sputter deposited SiO2/Si multilayer stacks
Keywords: رسوب اسپری پرتو یون; ICP–RIE etching; SiO2/Si multilayer stack; Thin film; Ion beam sputter deposition
Effect of growth temperature on structural and morphological evolution of epitaxial SrTiO3 thin films grown on LaAlO3 (001) substrates by ion beam sputter deposition
Keywords: رسوب اسپری پرتو یون; SrTiO3; Epitaxial film; Crystal structure; Growth mode; Ion beam sputter deposition
Ion beam sputter deposition of Ag films: Influence of process parameters on electrical and optical properties, and average grain sizes
Keywords: رسوب اسپری پرتو یون; Ion beam sputter deposition; Ag films; Electrical conductivity; Optical properties; Grain size
Fabrication and characterization of epitaxial SrTiO3/Nb-doped SrTiO3 superlattices by double ECR ion beam sputter deposition
Keywords: رسوب اسپری پرتو یون; SrTiO3; Perovskite oxide superlattice; Epitaxy; Ion beam sputter deposition; Electron cyclotron resonance
Radiation effects on film formation and nanostructural changes of iron disilicide thin film
Keywords: رسوب اسپری پرتو یون; Beta iron disilicide; Alpha phase; Ion beam sputter deposition; Transmission electron microscopy; Cross-sectional observation; Columnar defects; High-energy heavy-ion irradiation;
Ion beam sputter deposition of V2O5 thin films
Keywords: رسوب اسپری پرتو یون; Ion beam sputter deposition; V2O5 thin films; XRD; TEM; EELS; Li intercalation
Ion beam sputter deposited TiAlN films for metal–insulator–metal (Ba,Sr)TiO3 capacitor application
Keywords: رسوب اسپری پرتو یون; Ion beam sputter deposition; TiAlN films; MIM capacitor; (Ba,Sr)TiO3
Photoluminescence characterization of β-FeSi2 prepared by ion beam sputter deposition (IBSD) method
Keywords: رسوب اسپری پرتو یون; Silicides; β-FeSi2; Photoluminescence; Ion beam sputter deposition
Effects of nitrogen partial pressure on electrical properties and thermal stability of TiAlN films by ion beam sputter deposition
Keywords: رسوب اسپری پرتو یون; TiAlN; IBSD; Nitrogen partial pressure; Ion beam sputter deposition; Thermal stability
Advanced ion beam technology for versatile oxide thin film formation
Keywords: رسوب اسپری پرتو یون; 81.15.J; 41.75.A; 68.55; Oxide films; Ion-assisted deposition; Ion beam sputter deposition; Ion-assisted reaction;
Trench gap-filling copper by ion beam sputter deposition
Keywords: رسوب اسپری پرتو یون; Ion beam sputter deposition; Annealing; Gap-filling; Trench
A new mask blank deposition tool
Keywords: رسوب اسپری پرتو یون; EUV lithography; Mask blanks; Ion beam sputter deposition; Mo/Si; Multilayers; MLM;
Material properties and growth control of undoped and Sn-doped In2O3 thin films prepared by using ion beam technologies
Keywords: رسوب اسپری پرتو یون; Undoped In2O3; Sn-doped In2O3; Ion-assisted deposition; Ion beam sputter deposition; Ion-assisted reaction