
Metal ALD and pulsed CVD: Fundamental reactions and links with solution chemistry
Keywords: متیل; acac; acetylacetonate; AES; atomic emission spectroscopy; ALD; atomic layer deposition; allyl; C3H5; allylR; CH2CRCH2; allylR2; RCHCHCHR; amdR; RNCMeNR amidinate; amdR,Râ²; RNCR'NR amidinate; nBu; n-butyl; sBu; sec-butyl; tBu; tert-butyl; CHD; 1,3-cycl