Robust Si3N4 masks for 100Â nm selective area epitaxy of GaAs-based nanostructures
Keywords: اپیتاکسی منطقه ای انتخابی; 81.05.Ea (III-V semiconductors); 81.07.Ta (quantum dots); 81.15.Hi (molecular, atomic, ion and chemical beam epitaxy); Selective area epitaxy; Shadow mask; Si3N4-membranes; Molecular beam epitaxy; Semiconductor quantum dots;