Keywords: metrology مجازی; Chemical vapor deposition; Etching; Industry automation; LASSO; Lithography; Regularization methods; Ridge regression; Semiconductor manufacturing; Statistical modeling; Virtual metrology
مقالات ISI ترجمه شده metrology مجازی
مقالات ISI metrology مجازی (ترجمه نشده)
مقالات زیر هنوز به فارسی ترجمه نشده اند.
در صورتی که به ترجمه آماده هر یک از مقالات زیر نیاز داشته باشید، می توانید سفارش دهید تا مترجمان با تجربه این مجموعه در اسرع وقت آن را برای شما ترجمه نمایند.
در صورتی که به ترجمه آماده هر یک از مقالات زیر نیاز داشته باشید، می توانید سفارش دهید تا مترجمان با تجربه این مجموعه در اسرع وقت آن را برای شما ترجمه نمایند.
Keywords: metrology مجازی; Gaussian process regression; Multitask learning; Sparse regularization; Tree-based ensemble; Virtual metrology;
Keywords: metrology مجازی; Virtual metrology; Semiconductor manufacturing; Adaptive update; Reliability estimation;
Keywords: metrology مجازی; Fused lasso; Feature selection; Predictive model; Plasma etch; Spectroscopic signal; Virtual metrology
Keywords: metrology مجازی; Semi-supervised learning; Support vector regression; Probabilistic local reconstruction; Data generation; Virtual metrology; Semiconductor manufacturing
Keywords: metrology مجازی; Variable selection; Integrated squared response; Plasma etching; Multivariable control; Virtual metrology; Relative gain array
Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks
Keywords: metrology مجازی; Chemical mechanical planarization; Virtual metrology; Semiconductor; GMDH; Neural networks;
Virtual metrology for copper-clad laminate manufacturing
Keywords: metrology مجازی; Virtual metrology; Copper-clad laminate; Quality control; Actual process data; Prediction model;
Virtual Metrology Concept for Predicting Defect Levels in Semiconductor Manufacturing
Keywords: metrology مجازی; Virtual Metrology; Quality Control; Defect Levels; Semiconductor Manufacturing;
Virtual metrology on semiconductor manufacturing based on Just-in-time learning*
Keywords: metrology مجازی; Virtual metrology; Just-in-time learning; Measurement sampling; DTM variables; ETM variables; Similarity
Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing
Keywords: metrology مجازی; Novelty detection; Faulty wafer detection; Semiconductor manufacturing; Virtual metrology; Dimensionality reduction
Real-time virtual metrology and control for plasma etch
Keywords: metrology مجازی; Virtual metrology; Plasma etch; Predictive functional control; Electron density; Etch rate; Advanced process control;
A virtual metrology model based on recursive canonical variate analysis with applications to sputtering process
Keywords: metrology مجازی; Canonical variate analysis; Partial least squares; Virtual metrology; Sputtering process; R2 statistics;
Integrating support vector machine and genetic algorithm to implement dynamic wafer quality prediction system
Keywords: metrology مجازی; Virtual metrology; Support vector machine; Genetic algorithm
A virtual metrology system for semiconductor manufacturing
Keywords: metrology مجازی; Virtual metrology; Fault detection; Data mining; Dimensionality reduction; Regression; Semiconductor manufacturing
Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares
Keywords: metrology مجازی; Semiconductor manufacturing; Advanced process control; Virtual metrology; Partial least squares; EWMA control
Control relevant issues in semiconductor manufacturing: Overview with some new results
Keywords: metrology مجازی; Semiconductor manufacturing; Process systems engineering; Virtual metrology; Wafer acceptance test; Rapid thermal processing; Control structure designAEC, advanced equipment control; APC, advanced process control; ARIMA, auto-regressive integrated moving