A virtual metrology model based on recursive canonical variate analysis with applications to sputtering process

► We present a detailed approach for constructing a VM model using a recursive CVA. ► The VM model can capture the directions of maximum correlation between process variables and quality variables. ► We examine the capability of the VM model using different faults occurring in process variables or quality variables. ► Superiority of the proposed model is presented when it applied to an industrial sputtering process.