کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10269392 | 459855 | 2005 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of patterned nanostructures with various metal species on Si wafer surfaces by maskless and electroless process
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی شیمی
مهندسی شیمی (عمومی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Fabrication of patterned nanostructures with various metal species on Si wafer surfaces by maskless and electroless process Fabrication of patterned nanostructures with various metal species on Si wafer surfaces by maskless and electroless process](/preview/png/10269392.png)
چکیده انگلیسی
Maskless and electroless fabrication was demonstrated to form patterned nanostructures of various metal species, based upon the process previously developed by the authors. In this process, the metallic nanostructures were formed on the surface of clean, hydrogen terminated p-(1 0 0) Si wafer with pre-patterned nanoscopic defects, which were confirmed to possess higher activity for the reductive deposition reaction of the metal ion species. The deposition was achieved spontaneously and selectively at the defect sites on the wafer surface by immersing into dilute aqueous fluoride solution containing trace amount of metal ion species. By optimizing the formation condition of the patterned defects and composition of the solution, fabrication of patterned nanostructures of various metallic species such as Au, Ag, and Co, was achieved. Formation of the patterned nanostructures to 10 μm2 in extent, as well as control of the feature size of the deposits by adjusting the formation condition of the patterned defects were also attempted.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Electrochimica Acta - Volume 51, Issue 5, 10 November 2005, Pages 834-837
Journal: Electrochimica Acta - Volume 51, Issue 5, 10 November 2005, Pages 834-837
نویسندگان
Nobuhiro Kubo, Takayuki Homma, Yosuke Hondo, Tetsuya Osaka,