کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10364410 | 871623 | 2011 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Low-loss CaxBa1âxNb2O6 ridge waveguide for electro-optic devices
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Low-loss CaxBa1âxNb2O6 ridge waveguide for electro-optic devices Low-loss CaxBa1âxNb2O6 ridge waveguide for electro-optic devices](/preview/png/10364410.png)
چکیده انگلیسی
Optical ridge waveguide using calcium barium niobate (CBN) on silicon substrate for the first time is designed, fabricated and characterized for future integrated electro-optic devices. To obtain single-mode propagation, the CBN thin strip is designed to be surrounded by thick silicon dioxide layer forming a ridge waveguide. Deposition of CBN film on profiled silicon dioxide introduces spatial separation which solves the CBN etching problem. Fabrication, edge polishing and near-field mode profile measurement of the waveguide are carried out. The measurement is in good agreement with the simulation and an exact loss as low as 2.15Â dB/cm was obtained for the fabricated waveguide.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 88, Issue 3, March 2011, Pages 218-221
Journal: Microelectronic Engineering - Volume 88, Issue 3, March 2011, Pages 218-221
نویسندگان
Ebrahim Mortazy, Irina Stateikina, Amirhossein Tehranchi, Sébastien Delprat, Mohamed Chaker, Ke Wu,