کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10401021 | 891136 | 2005 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Study on the diamond-like carbon multilayer films for tribological application
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
In this paper, DLC multilayer films consisting of alternating layers of soft and hard carbon films were deposited on Si wafer by a plasma CVD deposition system. Different DLC multilayer films were prepared by varying the sub-layer thickness (from 1000 to 25 nm) and the ratio of hard to soft sub-layer (H/S) thickness (from 1:1 to 4:1). By using a ball-on-disk tribo-tester, the friction and wear properties of the DLC multilayer films were measured in vacuum, O2 and dry-air environments respectively. By comparing with single-layer DLC film, the change of the multilayer structure has little influence on friction coefficient of the multilayer films. However, the wear rate of the DLC multilayer films is restricted effectively by constructed the multilayer structure in the film. The wear rate of the multilayer films is lower than that of the single film in reactive (O2 and dry-air) environments. An DLC multilayer film with excellent wear resistance, approximately in the level of 10â8 mm3/Nm in different environments (dry-air, O2 and vacuum), is obtained as the DLC multilayer film at a certain sub-layer thickness and ratio.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 14, Issue 8, August 2005, Pages 1361-1367
Journal: Diamond and Related Materials - Volume 14, Issue 8, August 2005, Pages 1361-1367
نویسندگان
W. Zhang, A. Tanaka, B.S. Xu, Y. Koga,