Metal Imaging on Surface of Micro- and Nanoelectronic Devices by Laser Ablation Inductively Coupled Plasma Mass Spectrometry and Possibility to Measure at Nanometer Range

An imaging LA-ICP-MS procedure was developed to map the elements of interest (Au, Ti, Pt, Cr) on the surface IDA-chip. For the analysis at nanometer resolution scale, a near-field-LA-ICP-MS procedure was applied.