Determination of impurities in titanium nitride by slurry introduction axial viewed inductively coupled plasma optical emission spectrometry

A method of slurry nebulization for inductively coupled plasma optical emission spectrometry (ICP-OES) applied to the analysis of titanium niride(TiN) was reported. The TiN slurry sample was prepared with adding dispersant polyacrylate amine or polyethylene imine for the stabilization and homogenization of suspension, and the amount of additives was optimized. A Babington type cross-flow nebulizer with V-groove was used for nebulization of the slurry for avoidance of blockage from the particles. The stability of slurry was characterized via zeta potential measurement, scanning electron microscope observation, particle size distrbution measurement and signal stability testing. For nm size TiN, calibration curves could be established by aqueous standards and the analytical results were in good accordance with the alkaline fusion method. For μm size TiN, a negative deviation was observed for most of elements and this deviation can be corrected by using Ti intrinsic internal standard method.