Polymers in conventional and alternative lithography for the fabrication of nanostructures

► Conventional lithography techniques and resist materials are discussed. ► Methods include optical lithography, electron beam- and ion beam-lithography. ► Unconventional high-resolution patterning technologies are reviewed. ► Discussed unconventional methods include printing, molding and embossing. ► Strengths, limitations and prospects of patterning technologies are treated.