Preparation of ferroelectric BaTi2O5 thin films on Pt(1Â 1Â 1)/Ti/SiO2/Si substrates by pulsed laser deposition

► Single BaTi2O5 phase was firstly prepared on Pt(1 1 1)/Ti/SiO2/Si substrates by pulsed laser deposition. ► Relatively high b-axis oriented BaTi2O5 films deposited on Pt(1 1 1)/Ti/SiO2/Si substrates were attained. ► The polarization-electric field (P-E) loop of the BaTi2O5 thin film was measured for the first time.