Mechanical performance and nanoindenting deformation of (AlCrTaTiZr)NCy multi-component coatings co-sputtered with bias

► Robust (AlCrTaTiZr)NCy multi-component films were developed as hard coatings. ► A nanocomposite structure was formed with substrate biases larger than 100 V. ► Hardness reached 35 GPa because of strong distortion-induced strengthening effect. ► Deformation was dominated by reversible formation and vanishment of low-angle dislocations.