Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation

Elastic properties of diamond-like carbon (DLC) layers with gradient carbon-silicon interlayer were studied by resonant ultrasound spectroscopy (RUS) and standard nano-indentation technique. The DLC layers were prepared by pulsed laser deposition on SiC/Si substrates. The RUS method is based on modal analysis of the specimen vibration. The resonant frequency shifts caused by the layer are for the evaluation of the dynamic in-plane elastic properties of the deposited DLC. The results were compared with the quasi-statical quantities - Young's modulus and hardness, obtained by nanoindentation using the AFM tip.