Simulation of ion imaging: Sputtering, contrast, noise

► In this article, an algorithm is proposed to simulate ion images. ► Focus is on: sputtering, secondary electron yield, noise ions and secondaries. ► The detection noise is not negligible in ion microscopy. ► The sputtering pattern must be taken into account when evaluating the resolution. ► The distinctive SE yield explains the high resolution of He-FIBs.