کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10707464 | 1023647 | 2011 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effects of plasma species on the N incorporation of GaAsSbN grown by plasma-assisted gas-source molecular-beam epitaxy
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We report the effects of plasma species on the N incorporation of GaAsSbN. Optical emission spectroscopy and quadruple mass spectroscopy were used to characterize the plasma source. We found a simple correlation between the atomic N species and meta-stable molecular N2â species that is independent of plasma power and N2 flow rate. In order to achieve atomic-N-rich growth conditions, we place a PBN shutter in front of our plasma source, rich in meta-stable N2* molecules, to facilitate the relaxation of N2* and turn the growth condition into an atomic-N-dominant one. When an atomic-N-rich condition is used, N incorporation rate decreases when Sb flux increases and increases as growth temperature increases. This behavior is well explained by a surface kinetics model. When a N2*-rich condition is used, the N incorporation in GaAsSbN is enhanced by increase in Sb flux and growth temperature.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 318, Issue 1, 1 March 2011, Pages 363-366
Journal: Journal of Crystal Growth - Volume 318, Issue 1, 1 March 2011, Pages 363-366
نویسندگان
Ta-Chun Ma, Yan-Ting Lin, Hao-Hsiung Lin,