Development of Orthogonal Acceleration Time-of-Flight Mass Spectrometer for Detection of Ions with Wide Energies Distribution

A time-of-flight mass spectrometer was developed for the detection of ions with wide energies distribution. The instrument associated with an electron impact source. The ions flow was effectively modulated by a lens system and then introduced into the time-of-flight mass analyzer which included a dual field of acceleration region, a reflection region, and a large-size micro channel plate (MCP) detection device. The characteristics of the spectrometer were as follows: half-peak width of single ion signal was about 2 ns, resolution of the instrument was better than 1600 FWHM, mass range of actual samples was 1–127 amu in comparison with the theoretical mass detection limit of higher than 800 amu, and ion energy detection range was better than two orders of magnitude (3–140 eV). If coupled with short-instantaneous pulse discharge ion source, the TOF mass analyzer would be used in the field of rapid detection of high-energy ion beam, such as vacuum cathode discharge preparation of thin films, ion injection material characterization, ion charge state distribution of conductive material and determination of ion diffusion speed.

A time-of-flight mass spectrometer was developed for the detection of ions with wide energies distribution. The whole instrument includes vacuum system, electron impact ion source, time-of-flight mass analyzer, data acquisition system and so on. Ions with different energies distribution flied out of angle reflection region, which would hit on different positions of ion detector, and were detected by the dual anode plates finally.Figure optionsDownload as PowerPoint slide