Focusing of soft X-ray radiation and characterization of the beam profile enabling X-ray emission spectrometry at nanolayered specimens

► Soft X-ray undulator radiation was focused using a single bounce monocapillary. ► Spot sizes of 10 μm-15 μm could be achieved retaining 34% of the incident radiant. ► Higly increased effiiciency of a wavelength-dispersive spectrometer.. ► That enables X-ray emission spectrometry analysis of nanoscaled materials.