Design of an apparatus for polarization measurement in soft X-ray region

A novel apparatus for polarization measurement in the soft X-ray region has been designed, constructed, and installed in the evaluation beamline for soft X-ray optical elements (BL-11) at the SR Center of Ritsumeikan University, Shiga, Japan. It allows us to perform conventional reflection and transmission measurements including rocking curve measurement as well as polarimetric and ellipsometric measurements based on the rotating-analyzer method by using six independently movable motorized stages. As a preliminary test of the apparatus, the reflection profile of a Mo/SiO2 multilayer mirror prepared by an ion beam sputtering technique, which is designed as a reflection polarizer for use of 13.9 nm, has been measured by the apparatus. The result is compared with that by an existing reflectometer, and the azimuth angle dependence of the reflection intensity has been demonstrated. Consequently, it is shown that the apparatus has the capability to perform the rotating-analyzer ellipsometry.