Quantitative analysis of single aerosol particles using polycapillary X-ray optics

A laboratory micro X-ray fluorescence spectrometer based on polycapillary X-ray optics (PXRO) was used to carry out the quantitative X-ray fluorescence analysis of single aerosol particles with smaller size than that of focal spot of PXRO. The minimum detection limits measured with the thin-film reference standards were in the range from 13.3 to 0.7 ng cm− 2 when the operating current and voltage were 70 mA and 35 kV, respectively. In order to reduce the effects of the inhomogeneous distributions of the X-ray intensity in the focal spot of the PXRO on the analysis results, the sensitivities were corrected by using a Gaussian function for the quantitative analysis of single aerosol particles. The accuracy of the analysis of single standard solution drops was on average 25% depending on the element and concentration. The precision of the analysis was better than 5%.