Characterization of nano-composite oxide ceramics and monitoring of oxide thin film growth by laser-induced breakdown spectroscopy

Multi-component oxide ceramics and epitaxial oxide thin films are analyzed by laser-induced breakdown spectroscopy (LIBS). Furthermore, pulsed-laser deposition (PLD) of thin films is investigated by long-term monitoring of the optical plasma emission. Both nano-composite high-temperature superconductors (HTS) consisting of YBa2Cu3O7 − δ bulk and Y2Ba4MCuOx (M-2411, M = Ag, Nb) nano-particles, and semiconducting ZnO doped with Aluminum and Lithium are ablated by nano-second laser pulses. The plasma emission is recorded using grating spectrometers with intensified gated detectors. The LIBS signals of nano-particles correlate with the nominal content of the M-2411 phase (0–15 mol%) and reveal a strong signal of Ytterbium impurity (3–35 ppm). In situ monitoring of the PLD process shows element signals that are stable for more than 10,000 laser pulses for both HTS and ZnO ceramics. The relative concentration of elements in thin films and ceramics as determined by LIBS is almost the same.