کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1419217 986031 2006 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Local chemical vapor deposition of carbon nanofibers from photoresist
موضوعات مرتبط
مهندسی و علوم پایه مهندسی انرژی انرژی (عمومی)
پیش نمایش صفحه اول مقاله
Local chemical vapor deposition of carbon nanofibers from photoresist
چکیده انگلیسی

The addition of nanofeatures to carbon microelectromechanical system (C-MEMS) structures would greatly increase surface area and enhance their performance in miniature batteries, super-capacitors, electrochemical and biological sensors. Negative photoresist posts were patterned on a Au/Ti contact layer by photolithography. After pyrolyzing the photoresist patterns to carbon patterns, graphitic nanofibers were observed near the contact layer. The incorporation of carbon nanofibers in C-MEMS structures via a simple pyrolysis of modified photoresist was investigated. Both experimental results considered to consist of a local chemical vapor deposition mechanism. The method represents a novel, elegant and inexpensive way to equip carbon microfeatures with nanostructures, in a process that could possibly be scaled up to the mass production of many electronic and biological devices.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Carbon - Volume 44, Issue 14, November 2006, Pages 3073–3077
نویسندگان
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