Structural and optical properties of ZnSO alloy thin films with different S contents grown by pulsed laser deposition

ZnSO thin films with different S contents were deposited on quartz substrates by pulsed laser deposition. X-ray diffraction patterns suggested that all the films have a hexagonal wurtzite ZnO structure with a highly c-axis orientation. XPS measurements confirmed the alloying behavior of S. EDS results revealed that S content in ZnSO films could be modulated by the growth temperature and efficient S alloying can be achieved under low growth temperatures. The composition dependence of the band gap energy in ZnSO system was determined by optical transmission and the optical bowing parameter was found to be about 2.13 eV.