کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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1614947 | 1516342 | 2013 | 4 صفحه PDF | دانلود رایگان |
Fabrication and charge/discharge behaviors of all-solid-state individual Li ion secondary battery with a Li free anode and a polymer electrolyte are studied. The battery with a 300 × 300 μm2 area, consisting of multiple layers (Poly Si anode/a poly methacrylate acetate (PMMA)/LiMn2O4), is prepared by combining a sol–gel spin-coating method and Si very-large-scale integration technologies. The PMMA solid electrolyte containing LiClO4 for the battery is embedded into an individual trench (300 × 300 μm2 in area and 2.0 μm in depth) of a double insulating layer (Si3N4/SiO2), which is directly stacked on a poly Si layer, leading to a Li free anode. The individual battery demonstrates a specific capacity of 3.70 nAh/cm2 obtained for the charge of 3 nA and discharge of 10 pA. A Rutherford backscattering study of Cl in the PMMA electrolyte suggests that 2.3 × 1021 cm−3 of Li is included in the electrolyte.
Journal: Journal of Alloys and Compounds - Volume 551, 25 February 2013, Pages 44–47