Room-temperature MBE deposition, thermoelectric properties, and advanced structural characterization of binary Bi2Te3 and Sb2Te3 thin films

► MBE deposition at room temperature and subsequent annealing for phase formation. ► This growth procedure easily yielded stoichiometric Sb2Te3 and Bi2Te3 thin films. ► Sb2Te3 films revealed favorable charge carrier density and mobility. ► Advanced characterization of texture by high-energy X-ray diffraction. ► Precise chemical analysis by calibrated EDX spectroscopy and energy-filtered TEM.