کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1617547 1005689 2011 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Synthesis and high temperature XRD studies of tantalum nitride thin films prepared by reactive pulsed dc magnetron sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فلزات و آلیاژها
پیش نمایش صفحه اول مقاله
Synthesis and high temperature XRD studies of tantalum nitride thin films prepared by reactive pulsed dc magnetron sputtering
چکیده انگلیسی

In the present work, the growth characteristics of tantalum nitride (TaN) thin films prepared on (1 0 0) Si substrates by reactive pulsed DC magnetron sputtering are investigated. XRD analyses indicated the presence of α-Ta and β-Ta in the films deposited in pure argon atmosphere, while β-TaN and fcc-TaN phases appeared for 2 sccm of nitrogen, and cubic TaN for 5–25 sccm of nitrogen in the sputtering gas mixture of argon and nitrogen at a substrate temperature of 773 K. The TaN films obtained with increasing substrate temperature and pulse width showed a change in the texture from [1 1 1] to [2 0 0] orientation. Atomic force microscopy (AFM) results indicated that the average surface roughness was low for films deposited in pure argon than for the films deposited in a mixed Ar + N2 atmosphere. Nanocrystalline phase of the deposited material was identified from the high-resolution transmission electron microscopy (HRTEM) images. X-ray photoelectron spectroscopy (XPS) core level spectra confirmed the formation of TaN phase. The high temperature X-ray diffraction analysis of the optimized TaN thin film was performed in the temperature range 298–1473 K. The lattice parameter of the TaN films was found to increase from 4.383 to 4.393 Å on increasing the temperature from 298 to 823 K and it reduced to 4.345 Å at 1473 K. The thermal expansion coefficient value was found to be negative for the TaN films.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 509, Issue 22, 2 June 2011, Pages 6400–6407
نویسندگان
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