Effects of film thickness on microstructure and properties of Bi3.15Nd0.85Ti3O12 thin films fabricated by chemical solution deposition

The effects of thickness on the microstructure and ferroelectric properties of Bi3.15Nd0.85Ti3O12 (BNT) thin films prepared by chemical solution deposition were studied. It was found that the grain size and residual stress are not sensitive to the film thickness in our studied thickness of 160–440 nm. However, the ferroelectric properties depend strongly on the film thickness. The mechanism concerning the dependence of ferroelectric properties of BNT films on the film thickness was discussed.