کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1625506 | 1516427 | 2008 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Electrical and mechanical properties of DLC coatings modified by plasma immersion ion implantation
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فلزات و آلیاژها
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
DLC (a-C:H) films were deposited by the plasma enhanced chemical vapor deposition (PECVD) on silicon substrate and then post-implanted by plasma immersion ion implantation (PIII) at different voltages and ion species (Ar, N2 and C2H2). Microstructure, dielectric constant and nano-hardness of the modified DLC films were studied. It is found that implanted C2H2 ions can effectively increase the nano-hardness of DLC films from 13.5 to 25.3 GPa and reduce the dielectric constant to 2.5 in the bias voltage range of −35 to −40 kV. The improved properties are mainly associated with the increase in the ratio of sp3 CC/sp2 CC bonds and the reaction mechanisms in the implantation zone are discussed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 449, Issues 1–2, 31 January 2008, Pages 379–383
Journal: Journal of Alloys and Compounds - Volume 449, Issues 1–2, 31 January 2008, Pages 379–383
نویسندگان
S.M. Chiu, S.C. Lee, C.H. Wang, F.C. Tai, C.W. Chu, Dershin Gan,