Study of oxygen vacancies′ influence on the lattice parameter in ZnO thin film

► (002)-preferred ZnO thin film was deposited at ambient temperature with good quality. ► (103) texture was observed on the surface of the as-deposited film. ► VO concentration variation in the annealed films was confirmed from XPS O 1s analysis. ► VO was supposed to decrease the lattice parameter in the ZnO film.