کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1656683 | 1517596 | 2015 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Residual stress measurement in DLC films deposited by PBIID method using Raman microprobe spectroscopy
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Diamond-like carbon (DLC) films were prepared and their residual stresses were measured nondestructively using Raman microprobe spectroscopy. The plasma-based ion implantation and deposition (PBIID) method was used to coat the DLC films on thin glass substrates using acetylene, a mixture of acetylene and toluene, or only toluene gas at 1.0 Pa. Peaks in the Raman spectra of the DLC films were assigned as the Dâ²(disordered) or C-C bonding peaks at 1150 cmâ 1. The phonon deformation potentials (aâ²) of the films were estimated from data for the phonon deformation potentials for pure graphite and diamond and calculated using the sp3/sp2 bonding ratio and the hydrogen content of the films. Thus, a relation was observed between the Raman shift of the G peak (ÏG) and the residual stress (Ïc) in each film. The Raman shifts (Ï0) of the G peak for the films with no deformation were 1554, 1556, and 1562 cmâ 1 for the films deposited using acetylene, a mixture gas and toluene gas. Moreover, only toluene had stress constants of â 0.378, â 0.384, and â 0.391 GPa/cmâ 1. The residual stresses constant in each film using (8.2 Ã 10â 4·aâ²)â 1 Ï0â 1 were estimated as â 0.379, â 0.384, and â 0.391 GPa/cmâ 1. The Raman shift of the D peak remained stationary as the compressive Ïc in the films increased but changed when the deposition gas was varied. The distance the D peak moved from 1420 cmâ 1 corresponded to that of the G peak from 1560 cmâ 1 in the Raman spectra of the films in the stress-free state. In addition, the compressive residual stress in the DLC film had a major impact on the hardness.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 283, 15 December 2015, Pages 274-280
Journal: Surface and Coatings Technology - Volume 283, 15 December 2015, Pages 274-280
نویسندگان
Yasuhiro Miki, Akio Nishimoto, Takumi Sone, Yoshiji Araki,