Nanomechanical and nanotribological properties of hydrophobic fluorocarbon dielectric coating on tetraethoxysilane for electrowetting applications

► We study adhesion of hydrophobic dielectric coatings for electrowetting applications. ► Mechanical integrity and contribution of each individual layer are discussed. ► A clear switch from pile-up to sink-in deformation in the interface occurs. ► The sandwich-like coating exhibits improved adhesion strength.