کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1660799 | 1008413 | 2007 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Plasma characteristics in pulse-mode plasmas using time-delayed, time-resolved Langmuir probe diagnoses
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Plasma characteristics in pulse-mode plasmas using time-delayed, time-resolved Langmuir probe diagnoses Plasma characteristics in pulse-mode plasmas using time-delayed, time-resolved Langmuir probe diagnoses](/preview/png/1660799.png)
چکیده انگلیسی
A new method called time-delayed, time-resolved Langmuir probe measurement is used to measure pulsed plasmas to overcome the secondary electron emission during high-voltage pulses. This method has been verified with a good agreement with an in-situ Faraday cup dosimetry technique. The plasma characteristics of the pulsed-mode, non-continuous plasma and continuous plasma with high-voltage pulses are measured and analyzed using this method. The continuous plasma with high-voltage pulses shows higher plasma densities, lower working pressure and pulse voltage, larger and more flexible process windows, and less charging effect.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 201, Issue 15, 23 April 2007, Pages 6508–6515
Journal: Surface and Coatings Technology - Volume 201, Issue 15, 23 April 2007, Pages 6508–6515
نویسندگان
Shu Qin, Allen McTeer,