Plasma characteristics in pulse-mode plasmas using time-delayed, time-resolved Langmuir probe diagnoses

A new method called time-delayed, time-resolved Langmuir probe measurement is used to measure pulsed plasmas to overcome the secondary electron emission during high-voltage pulses. This method has been verified with a good agreement with an in-situ Faraday cup dosimetry technique. The plasma characteristics of the pulsed-mode, non-continuous plasma and continuous plasma with high-voltage pulses are measured and analyzed using this method. The continuous plasma with high-voltage pulses shows higher plasma densities, lower working pressure and pulse voltage, larger and more flexible process windows, and less charging effect.