Synthesis and characterization of nano-sized nitride particles by using an atmospheric microwave plasma technique

Metal nitride nanoparticles, such as titanium nitride (TiN), vanadium nitride (VN), and silicon nitride (Si3N4), were directly synthesized via decomposition of gas-phase starting materials by an atmospheric microwave plasma torch. The reactants in gas-phase are fragmented to atoms or molecules and then the fragmented species create particles in micro or nano size. X-ray diffraction, field-emission scanning electron microscope, and field-emission transmission electron microscopy have been employed to investigate powder diffractions, surface morphologies, particle sizes, etc. The particle sizes of as-produced samples are approximately 10-25 nm, revealing well-ordered individual layers with high crystallinity.