A combinatorial approach to phase synthesis and characterisation in atmospheric pressure chemical vapour deposition

In this paper we present the results of a combinatorial approach to Atmospheric Pressure Chemical Vapour Deposition. By using a modified reactor with multiple reagent entry points, and introducing reagents into the reactor through these asymmetrically, a compositional gradient across a deposited film can be formed. The technique will be demonstrated with examples of titanium and tungsten oxides. The rapid analytical method used, the second key step in a combinatorial synthesis, is micro-focus X-ray diffraction mapping, and this will also be discussed.