کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1678075 1009927 2011 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Minimization of focused ion beam damage in nanostructured polymer thin films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Minimization of focused ion beam damage in nanostructured polymer thin films
چکیده انگلیسی

Focused ion beam (FIB) instruments have proven to be an invaluable tool for transmission electron microscopy (TEM) sample preparation. FIBs enable relatively easy and site-specific cross-sectioning of different classes of materials. However, damage mechanisms due to ion bombardment and possible beam heating effects in materials limit the usefulness of FIBs. Materials with adequate heat conductivity do not suffer from beam heating during FIB preparation, and artifacts in materials such as metals and ceramics are primarily limited to defect generation and Ga implantation. However, in materials such as polymers or biological structures, where heat conductivity is low, beam heating can also be a problem. In order to examine FIB damage in polymers we have undertaken a systematic study by exposing sections of a PS-b-PMMA block copolymer to the ion beam at varying beam currents and sample temperatures. The sections were then examined by TEM and scanning electron microscopy (SEM) and analyzed using electron energy loss spectroscopy (EELS). Our empirical results show beam heating in polymers due to FIB preparation can be limited by maintaining a low beam current (≤100 pA) during milling.

Research Highlights
► We examined FIB damage in polymers.
► PS-b-PMMA block copolymer sections were exposed to the FIB.
► The sections were then examined by TEM, SEM and EFTEM.
► We show FIB beam heating in polymers can be limited by using a low current.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 111, Issue 3, February 2011, Pages 191–199
نویسندگان
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