کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1678112 1009929 2008 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Composition analysis of semiconductor quantum wells by energy filtered convergent-beam electron diffraction
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Composition analysis of semiconductor quantum wells by energy filtered convergent-beam electron diffraction
چکیده انگلیسی
We show how energy-filtered convergent-beam electron diffraction (EFCBED) patterns can be used to determine the chemical composition of buried semiconductor strained quantum wells. Our method is based on a quantitative analysis of the intensities of high-order Bragg lines in the transmitted disc of EFCBED patterns taken from plan-view samples. This analysis makes it possible to determine the displacement vector R introduced between the top and bottom parts of the matrix by the deformation of the quantum well and consequently to determine its composition. This is illustrated in the case of an InxGa1−xAs quantum well buried in a GaAs matrix. A detailed analysis of the effect of experimental parameters on Bragg lines intensity is performed. In particular, the importance of the choice of the diffraction vector is pointed out. The relative uncertainty on the measurement of the indium content x is found to be lower than 5% and a possible occurrence of slight compositional fluctuations in the (0 0 1) growth plane is pointed out.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 108, Issue 4, March 2008, Pages 358-366
نویسندگان
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