Pure parametric excitation of a micro cantilever beam actuated by piezoelectric layers

This paper deals with the stability analysis of transverse motions of a cantilever microbeam sandwiched by two piezoelectric layers located on the lower and upper surfaces of the microbeam. Application of same DC and AC voltages to the upper and lower piezoelectric layers creates an axial force with steady and time-varying components. The eigenfunction expansion of the transverse motion equation leads to the creation of a Mathieu type parametric equation which is mostly seen in the stability analysis of the structures in the literature; using Floquet theory for single degree of freedom systems the stable and unstable regions of the problem are investigated. The effect of viscous damping and DC voltage on the stability region of the problem is also studied. The results show the stabilizing effect of the viscous damping and positive DC voltage on the behavior of the microbeam. The achieved results are finally compared with those reported in the literature.