Static pull-in analysis of electrostatically actuated microbeams using homotopy perturbation method

In this study, static pull-in instability of electrostatically-actuated microbridges and microcantilevers is investigated considering different nonlinear effects. Galerkin’s decomposition method is utilized to convert the nonlinear differential equations of motion to nonlinear integro-algebraic equations. Afterward, analytic solutions to static deflections of the microbeams are obtained using the homotopy perturbation method. Results are in excellent agreement with those presented in the literature.