Optical properties of Zn1−xMnxO thin films grown by molecular beam epitaxy

► We have grown high quality Zn1−xMnxO (x=0∼0.061) thin films by MBE. ► LO phonon lines up to 5 and 11 order for ZnO and ZnMnO samples, respectively. ► The intensities of LO phonon lines are sensitive to the band gap position. ► The Zn0.997Mn0.003O exhibits para-magnetism.