In-rich molecular beam epitaxy of InAs on Sb-terminated GaAs(001) surface

► Growth mode of InAs was studied as a function of Sb-induced template. ► Sb-terminated GaAs(001)-(2×3), (2×4) and (2×8) templates were prepared. ► Effect of Sb-induced template could be observed for In-rich growth conditions only. ► Sb-induced decrease of surface energy could trigger growth mode change.