High resolution synchrotron X-ray studies of phase separation phenomena and the scaling law for the threading dislocation densities reduction in high quality AlGaN heterostructure

► High resolution synchrotron X-ray studies of phase separation phenomena. ► Scaling law h−n variation of screw & edge type dislocation densities with the overgrowth thickness. ► RSM of higher orders SXRD and ASXRD reflections reveals the presence of several diffraction peaks. ► Synchrotron X-ray study reveals the occurrence of local differences in lattice constants of AlGaN.