Optical properties of hydrothermal-method-grown ZnO crystal as EUV laser diagnostics material

► Scintillation properties of hydrothermal method-grown zinc oxide (ZnO) were evaluated in the extreme ultraviolet (EUV) region. ► 1 ns decay time was obtained. ► Temperature-dependent measurements show that photosensitivity and speed are robust against temperature changes. ► Response time was improved to 70 ps by iron (Fe)-ion doping. ► This response time-improved ZnO will have promising applications in EUV lithography and X-ray free electron laser (XFEL) research.