Study of the thermal decomposition of “captured” intermediates in the CVD of ZnO from DEZ and H2O by TGA-DTA and quadrupole mass spectroscopy

The reaction intermediates in the APCVD of ZnO from Diethylzinc (DEZ) and H2O vapors were obtained at temperatures ranging from 25 to 700 °C by using a water-cooled substrate. The thermal decomposition properties of the samples were studied using simultaneous Thermogravimetric analysis and differential thermal analysis (TGA-DTA). A quadrupole mass spectrometer (QMS) was used to identify the gases evolved during thermal decomposition. Changes in the TGA-DTA pattern were observed when the reactor temperature was increased and also during ageing at room temperature. Up to three endothermic peaks were observed with peak temperatures at 80-100 °C (peak 1), 115-125 °C (peak 2), and 145-155 °C (peak 3). QMS analysis detected only water as the volatile component during thermal decomposition. The results were analyzed in combination with the results of our previous studies.