کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1795365 | 1524483 | 2007 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A comparative study of nonpolar a-plane and m-plane AlN grown on 4H-SiC by plasma-assisted molecular-beam epitaxy
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
AlN has been grown on 4H-SiC m -plane (11¯00) and a -plane (112¯0) substrates by RF-plasma-assisted molecular-beam epitaxy. Similarities and differences between the two growth orientations are discussed. High-quality AlN can be obtained in both orientations when grown in the metastable 4H-crystal structure. For both epilayer orientations Al-rich conditions were necessary to stabilize the 4H-polytype. 4H-AlN for both growth directions shows very narrow X-ray rocking curves widths less than 100 arcsec. a-plane 4H-AlN exhibited a much smoother morphology than m-plane 4H-AlN. On the other hand, reflection high-energy diffraction intensity oscillations in the initial growth stage were observed only for m-plane AlN.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volumes 301–302, April 2007, Pages 410–413
Journal: Journal of Crystal Growth - Volumes 301–302, April 2007, Pages 410–413
نویسندگان
J. Suda, M. Horita, R. Armitage, T. Kimoto,