کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1795589 | 1524482 | 2008 | 6 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Defect evolution during growth of SiC crystals Defect evolution during growth of SiC crystals](/preview/png/1795589.png)
SiC single crystals grown by sublimation exhibit relatively high dislocation densities and often contain a network of slightly misoriented grains. In order to understand the evolution of dislocation structures and grain boundaries during growth, we studied wafers sliced from different parts of the sublimation-grown SiC single crystals. The wafers have been characterized using imaging with crossed-polarizing filters, etching in molten KOH, optical microscopy and X-ray rocking curves. It was found that in the growth direction from the seed towards the boule dome the dislocation density decreases and the crystal quality as determined by X-ray diffraction measurements improves, while the cross-polarizer image contrast becomes more pronounced. The observed trends are discussed.
Journal: Journal of Crystal Growth - Volume 310, Issues 7–9, April 2008, Pages 1804–1809