کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1796526 | 1023747 | 2007 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Influence of polymer formation on metalorganic vapor-phase epitaxial growth of AlN
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Influence of polymer formation on metalorganic vapor-phase epitaxial growth of AlN Influence of polymer formation on metalorganic vapor-phase epitaxial growth of AlN](/preview/png/1796526.png)
چکیده انگلیسی
A modeling of reaction pathways in a TMAl/NH3/H2 system including parasitic and polymeric reactions for computational simulations was constructed to study temperature and pressure dependences of growth rates and gas-phase chemistry in metalorganic vapor-phase epitaxial growth of AlN. AlN growth rates calculated were in good agreement with experimental data. Reactive molecules such as MMAlNH and Al–N became the major gas-phase species at the high-temperature range. With increasing pressure, the polymerization of these species was enhanced and AlN growth rate significantly decreased.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 304, Issue 1, 1 June 2007, Pages 133–140
Journal: Journal of Crystal Growth - Volume 304, Issue 1, 1 June 2007, Pages 133–140
نویسندگان
Takeshi Uchida, Kazuhide Kusakabe, Kazuhiro Ohkawa,